Speaker
Description
Energy recovery linac (ERL) based EUV-FELs are among the most promising candidate technologies for next-generation lithography. The development of a 10-mA high-current injector cryomodule for ERL-FELs has been initiated. The cryomodule consists of three 1.3 GHz 2-cell superconducting cavities, which are designed to accelerate 10 mA electron beam to 10 MeV. The cavities will receive the process of mid-temperature furnace baking, to reach the specification of Q₀ = 3×10¹⁰ at 17.4 MV/m (@ 2.0K). The shape of 1.3 GHz TESLA cavity is reference for these 1.3 GHz 2-cell cavities, which adopt the beam pipe with large aperture. Therefore, all higher-order modes (HOMs) can propagate along the large pipe and be absorbed at ~40K. The dipole-mode impedance is well below the beam breakup (BBU) threshold in the simulation, with this damping scheme. Each cavity is equipped with two fundamental power couplers (FPC), which suppresses the effect of transverse kick on the beam. In addition, the multipacting effect and the mechanical performance of the cavity have been evaluated, and both meet the design requirements. Four 1.3 GHz 2-cell cavities have just been fabricated, which will be subjected to post process and vertical test soon.